Pashchenko, G.A., M.J. Kravetsky, and O.V. Fomin. “Singularities of Polishing Substrates GaAs by Chemo-Dynamical and Non-Contact Chemo-Mechanical Methods”. Physics and Chemistry of Solid State 16, no. 3 (September 15, 2015): 560–564. Accessed January 8, 2025. https://ktipe.pnu.edu.ua/index.php/pcss/article/view/1653.